Load lock type frequency adjustment device "SFE-B03-II"
Compact design, high precision, low price, high stability, high reproducibility.
The road lock-type frequency adjustment device "SFE-B03-II" has achieved space-saving, high precision, and low cost, with a takt time of 0.4 s/pcs or less. (※In the case of SMD 3.2 × 2.5, 24 MHz, H1000 ppm/s, L50 ppm/s) Equipped with a new ion gun (beam width: 100 mm), it can process 24 to 32 units simultaneously as standard. The high-precision, high-stability, and high-reproducibility transport mechanism allows for stable production of micro-works measuring 2.0 × 1.6 or less. It features an FL mode (load capacity automatic calculation mode). The maintenance of the ion gun body and contact mechanism has significantly improved. By adopting a two-chamber load lock system, the processing chamber is always maintained in a vacuum, so the takt time does not depend on the time for vacuum evacuation and atmospheric release. With the installation of an overdrive mechanism loader/unloader as an optional unit, continuous operation has become possible. 【Features】 ○ Compact design ○ High precision ○ Low cost ○ High stability ○ High reproducibility For more details, please contact us or download the catalog.
- 企業：昭和真空
- 価格：Other
